Patent Assignment
Reel/Frame 052401/0728
Assignment of Assignor's Interest
Recorded: 2020-04-15
Pages: 5
Assignors
CHANEMOUGAME, DANIEL
Executed: 2020-04-13
LIEBMANN, LARS
Executed: 2020-04-13
SMITH, JEFFREY
Executed: 2020-04-13
DEVILLIERS, ANTON
Executed: 2020-04-10
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Apparatus and Method for Simultaneous Formation of Diffusion Break, Gate Cut, and Independent N and P Gates for 3D Transistor Devices