Patent Assignment
Reel/Frame 052406/0076
Assignment of Assignor's Interest
Recorded: 2020-04-15
Pages: 3
Assignor
UEDA, ATSUSHI
Executed: 2020-01-27
Assignee
GIGAPHOTON INC.
400, OAZA YOKOKURASHINDEN, OYAMA-SHI, TOCHIGI, 3238558, JAPAN
Covered Property
(1)
Extreme Ultraviolet Light Generation Apparatus and Electronic Device Manufacturing Method