Patent Assignment
Reel/Frame 052438/0452
Assignment of Assignor's Interest
Recorded: 2020-04-20
Pages: 5
Assignors
KURATOMI, TAKASHI
Executed: 2020-01-15
CHEN, I-CHENG
Executed: 2020-01-15
GELATOS, AVGERINOS V.
Executed: 2020-02-24
LEI, PINGYAN
Executed: 2020-04-16
CHANG, MEI
Executed: 2020-04-16
TANG, XIANMIN
Executed: 2020-04-16
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Methods and Apparatus for Enhancing Selectivity of Titanium and Titanium Silicides During Chemical Vapor Deposition