Patent Assignment
Reel/Frame 052475/0266
Assignment of Assignor's Interest
Recorded: 2020-04-23
Pages: 3
Assignors
KUNO, TATSUYA
Executed: 2020-04-10
MORIOKA, IKUHISA
Executed: 2020-04-10
AIKAWA, KENICHIRO
Executed: 2020-04-10
Assignee
NGK INSULATORS, LTD.
2-56, SUDA-CHO, MIZUHO-KU, NAGOYA-CITY, AICHI-PREFECTURE, 467-8530, JAPAN
Covered Property
(1)
Electrostatic Chuck Assembly, Electrostatic Chuck, and Focus Ring