Electrostatic chuck assembly, electrostatic chuck, and focus ring
An electrostatic chuck assembly includes a ceramic body having a wafer placement surface that is a circular surface, and an F/R placement surface that is formed around the wafer placement surface and is positioned at a lower level than the wafer placement surface, a wafer attraction electrode embedded inside the ceramic body and positioned in a facing relation to the wafer placement surface, an F/R attraction electrode embedded inside the ceramic body and positioned in a facing relation to the F/R placement surface, a concave-convex region formed in the F/R placement surface to hold gas, a focus ring placed on the F/R placement surface, and a pair of elastic annular sealing members arranged between the F/R placement surface and the focus ring on the inner peripheral side and the outer peripheral side of the F/R placement surface, and surrounding the concave-convex region in a sandwiching relation.
1. An electrostatic chuck assembly comprising:
a ceramic body having a wafer placement surface that is a circular surface, and a focus ring placement surface that is formed around the wafer placement surface and is positioned at a lower level than the wafer placement surface;
a first electrode embedded inside the ceramic body and positioned in a facing relation to the wafer placement surface;
a second electrode embedded inside the ceramic body and positioned in a facing relation to the focus ring placement surface;
a concave-convex region formed in the focus ring placement surface to hold gas;
a focus ring placed on the focus ring placement surface; and
a pair of elastic annular sealing members arranged between the focus ring placement surface and the focus ring on inner peripheral side and outer peripheral side of the focus ring placement surface, and surrounding the concave-convex region in a sandwiching relation;
wherein a main body of the ceramic body except for a portion between the focus ring placement surface and the second electrode is formed of a first ceramic member with a volume resistivity at a level generating a Coulomb force, and a sub-body of the ceramic body constituted by the portion between the focus ring placement surface and the second electrode is formed of a second ceramic member with a volume resistivity at a level generating a Johnson-Rahbeck force; and
wherein the volume resistivity of the first ceramic member is different from the volume resistivity of the second ceramic member.
2. The electrostatic chuck assembly according to claim 1 , wherein the elastic annular sealing members are fitted into annular grooves formed in at least one of the focus ring placement surface and the focus ring.
3. An electrostatic chuck comprising:
a ceramic body having a wafer placement surface that is a circular surface, and a focus ring placement surface that is formed around the wafer placement surface and is positioned at a lower level than the wafer placement surface;
a first electrode embedded inside the ceramic body and positioned in a facing relation to the wafer placement surface;
a second electrode embedded inside the ceramic body and positioned in a facing relation to the focus ring placement surface;
a concave-convex region formed in the focus ring placement surface to hold gas; and
a pair of annular grooves formed on inner peripheral side and outer peripheral side of the focus ring placement surface, and surrounding the concave-convex region in a sandwiching relation;
wherein a main body of the ceramic body except for a portion between the focus ring placement surface and the second electrode is formed of a first ceramic member with a volume resistivity at a level generating a Coulomb force, and a sub-body of the ceramic body constituted by the portion between the focus ring placement surface and the second electrode is formed of a second ceramic member with a volume resistivity at a level generating a Johnson-Rahbeck force; and
wherein the volume resistivity of the first ceramic member is different from the volume resistivity of the second ceramic member.