Feeder member and wafer placement table
A feeder member is used to supply electricity to an electrode embedded in a ceramic base. The feeder member includes an electrode-side terminal that is made of a high-melting-point metal containing material and joined to the electrode, an intermediate member that is made of a Cu containing material and directly joined to the electrode-side terminal without using a brazing material, a cable support member that is made of a Cu containing material and joined to the intermediate member, and a cable that is made of a Cu containing material and that has one end whose end surface is welded to the cable support member.
1. A feeder member that is used to supply electricity to an electrode embedded in a ceramic base, the feeder member comprising:
an electrode-side terminal that is made of a high-melting-point metal containing material and that is joined to the electrode;
an intermediate member that is made of a Cu containing material and directly joined to the electrode-side terminal without using a brazing material;
a cable support member that is made of a Cu containing material and joined to the intermediate member; and
a cable that is made of a Cu containing material and that has one end whose end surface is welded to the cable support member.
2. The feeder member according to claim 1 ,
wherein the intermediate member and the cable support member are soldered together.
3. The feeder member according to claim 1 ,
wherein the cable support member is a bottomed cylindrical member having a hole portion formed on a side opposite to the intermediate member, and
wherein the cable has one end whose end surface is joined to a bottom surface of the hole portion of the cable support member.
4. The feeder member according to claim 1 ,
wherein the electrode-side terminal is made of a Mo containing material.
5. A wafer placement table comprising:
a ceramic base that includes, at a surface thereof, a wafer placement portion;
an electrode embedded in the ceramic base; and
a feeder member that is inserted into a surface of the ceramic base on a side opposite to the wafer placement portion and joined to the electrode,
wherein the feeder member is the feeder member according to claim 1 , and the electrode-side terminal is joined to the electrode.
6. The wafer placement table according to claim 5 ,
wherein the ceramic base is made of an alumina containing material, and
wherein the electrode-side terminal is made of a Mo containing material.