Patent Assignment
Reel/Frame 052491/0682
Assignment of Assignor's Interest
Recorded: 2020-04-24
Pages: 6
Assignors
YAMAGUCHI, HIROFUMI
Executed: 2020-04-01
SASAKI, YOSHIAKI
Executed: 2020-04-01
NISHIMORI, YUICHI
Executed: 2020-04-02
TANAKA, ATSUSHI
Executed: 2020-04-02
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method