Patent Assignment
Reel/Frame 052504/0335
Assignment of Assignor's Interest
Recorded: 2020-04-27
Pages: 7
Assignors
ZHANG, QI
Executed: 2020-04-07
LU, XINLIANG
Executed: 2020-02-10
CHUNG, HUA
Executed: 2020-03-26
YANG, HAICHUN
Executed: 2020-04-07
Assignee
MATTSON TECHNOLOGY, INC.
47131 BAYSIDE PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Silicon Oxide Selective Dry Etch Process
Patent:
10,692,730 →
Application:
16/557,346 →
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Sep 30, 2019
From: MATTSON TECHNOLOGY, INC.
To: MATTSON TECHNOLOGY, INC.; BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTD
Reel/Frame 050582/0796 →
Security Interest
Oct 19, 2020
From: MATTSON TECHNOLOGY, INC.
To: EAST WEST BANK
Reel/Frame 054100/0167 →
Release of Security Interest
Apr 15, 2021
From: EAST WEST BANK
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 055950/0452 →