Patent Assignment
Reel/Frame 052527/0074
Assignment of Assignor's Interest
Recorded: 2020-04-29
Pages: 5
Assignors
SAKAI, MASASHI
Executed: 2020-04-14
KATSUKI, SHINICHIRO
Executed: 2020-04-15
KOBAYASHI, KAZUO
Executed: 2020-04-15
HINO, YASUNARI
Executed: 2020-04-16
Assignee
MITSUBISHI ELECTRIC CORPORATION
7-3, MARUNOUCHI 2-CHOME, CHIYODA-KU, TOKYO, 100-8310, JAPAN
Covered Property
(1)
Silicon Carbide Epitaxial Growth Device and Method of Manufacturing Silicon Carbide Epitaxial Wafer