Patent Assignment
Reel/Frame 052560/0266
Assignment of Assignor's Interest
Recorded: 2020-05-04
Pages: 3
Assignors
CHO, JAEYONG
Executed: 2020-04-29
DHINDSA, RAJINDER
Executed: 2020-04-27
ROGERS, JAMES
Executed: 2020-04-21
HUSAIN, ANWAR
Executed: 2020-04-21
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Sheath and Temperature Control of a Process Kit in a Substrate Processing Chamber