Patent Assignment
Reel/Frame 052678/0635
Assignment of Assignor's Interest
Recorded: 2020-05-15
Pages: 37
Assignors
ASAI, MASAYUKI
Executed: 2020-05-07
IMAMURA, TOMOKI
Executed: 2020-05-15
OKUDA, KAZUYUKI
Executed: 2020-04-28
INOKUCHI, YASUHIRO
Executed: 2020-05-07
MIZUNO, NORIKAZU
Executed: 2020-05-15
Assignee
KOKUSAI ELECTRIC CORPORATION
3-4, KANDAKAJI-CHO, CHIYODA-KU, TOKYO, 101-0045, JAPAN
Covered Property
(1)
Method of Processing Substate, Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium