Patent Assignment
Reel/Frame 052701/0634
Assignment of Assignor's Interest
Recorded: 2020-05-19
Pages: 4
Assignors
TANIKAWA, TAKEHIRO
Executed: 2020-05-13
YAMABE, SHUHEI
Executed: 2020-05-13
UCHIDA, YOHEI
Executed: 2020-05-13
SASAKI, YASUHARU
Executed: 2020-05-13
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus