Patent Assignment
Reel/Frame 052707/0522
Assignment of Assignor's Interest
Recorded: 2020-05-20
Pages: 4
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method