Patent Assignment
Reel/Frame 052818/0120
Assignment of Assignor's Interest
Recorded: 2020-06-03
Pages: 6
Assignors
HSU, CHE-CHANG
Executed: 2020-04-22
CHENG, CHIEH-JEN
Executed: 2020-05-08
CHEN, LI-JUI
Executed: 2020-05-22
CHIEN, SHANG-CHIEH
Executed: 2020-04-22
CHANG, CHAO-CHEN
Executed: 2020-04-22
CHEN, SSU-YU
Executed: 2020-04-27
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO.8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK,, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Photolithography Device Having Illuminator and Method for Adjusting Intensity Uniformity