Patent Assignment
Reel/Frame 052829/0980
Assignment of Assignor's Interest
Recorded: 2020-06-03
Pages: 3
Assignor
LIN, YUN-YUE
Executed: 2020-04-28
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Extreme Ultraviolet Mask and Method for Forming the Same