Patent Assignment
Reel/Frame 052856/0869
Confirmatory License
Recorded: 2020-06-05
Pages: 2
Assignor
UNIVERSITY OF COLORADO
Executed: 2020-06-02
Assignee
NATIONAL SCIENCE FOUNDATION
2415 EISENHOWER AVENUE, ROOM W 18000, ALEXANDRIA, VIRGINIA, 22314
Covered Property
(1)
Fabrication Of Corrugated Gate Dielectric Structures Using Atomic Layer Etching
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.