Patent Assignment
Reel/Frame 052864/0981
Assignment of Assignor's Interest
Recorded: 2020-06-08
Pages: 9
Assignors
LAI, FENGYUAN
Executed: 2018-12-05
GONG, BO
Executed: 2018-12-06
YUAN, GUANGBI
Executed: 2018-12-05
HSU, CHEN-HUA
Executed: 2018-12-05
VARADARAJAN, BHADRI
Executed: 2018-12-05
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Oxidation Resistant Protective Layer in Chamber Conditioning