Patent Assignment
Reel/Frame 052880/0813
Assignment of Assignor's Interest
Recorded: 2020-06-09
Pages: 3
Assignee
KOKUSAI ELECTRIC CORPORATION
3-4, KANDAKAJI-CHO, CHIYODA-KU, TOKYO, 1010045, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Non-Transitory Computer-Readable Recording Medium, Method of Manufacturing Semiconductor Device, And A Substrate Processing Method