Patent Assignment
Reel/Frame 052960/0957
Assignment of Assignor's Interest
Recorded: 2020-06-17
Pages: 10
Assignors
HAYASAKA, YUSUKE
Executed: 2020-05-28
CHUNG, JUN YOUNG
Executed: 2020-05-28
YAMABE, SHUHEI
Executed: 2020-05-28
YAMAGUCHI, KEIICHI
Executed: 2020-05-28
TANIKAWA, TAKEHIRO
Executed: 2020-05-28
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus