Patent Assignment
Reel/Frame 053029/0529
Assignment of Assignor's Interest
Recorded: 2020-06-24
Pages: 10
Assignors
CRAMER, HUGO AUGUSTINUS JOSEPH
Executed: 2018-12-17
BOS, HILKO DIRK
Executed: 2018-12-20
KOOP, ERIK JOHAN
Executed: 2019-01-09
KOOLEN, ARMAND EUGENE ALBERT
Executed: 2019-02-22
NIENHUYS, HAN-KWANG
Executed: 2018-12-17
POLO, ALESSANDRO
Executed: 2018-12-19
LIAN, JIN
Executed: 2019-02-20
DEN BOEF, ARIE JEFFREY
Executed: 2018-12-18
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Method of Measuring a Parameter of a Lithographic Process, Metrology Apparatus