Patent Assignment
Reel/Frame 053032/0277
Assignment of Assignor's Interest
Recorded: 2020-06-24
Pages: 4
Assignee
YANGTZE MEMORY TECHNOLOGIES CO., LTD.
18 GAOXIN 4TH ROAD, EAST LAKE HIGH-TECH DEVELOPMENT ZONE, WUHAN, HUBEI, CHINA
Covered Property
(1)
Systems Having Light Source with Extended Spectrum for Semiconductor Chip Surface Topography Metrology