Patent Assignment
Reel/Frame 053214/0336
Assignment of Assignor's Interest
Recorded: 2020-07-15
Pages: 3
Assignor
ABARRA, EINSTEIN NOEL
Executed: 2020-07-09
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Target Structure and Film Forming Apparatus