Patent Assignment
Reel/Frame 053226/0499
Assignment of Assignor's Interest
Recorded: 2020-07-16
Pages: 5
Assignee
HOYA CORPORATION
6-10-1 NISHI-SHINJUKU, SHINJUKU-KU, TOKYO, 160-8347, JAPAN
Covered Property
(1)
Substrate with Multilayer Reflective Film, Reflective Mask Blank, Reflective Mask, and Semiconductor Device Manufacturing Method