Patent Assignment
Reel/Frame 053237/0606
Assignment of Assignor's Interest
Recorded: 2020-07-17
Pages: 4
Assignee
NIKON CORPORATION
15-3, KONAN 2-CHOME, MINATO-KU, TOKYO, 108-6290, JAPAN
Covered Property
(1)
Processing Apparatus and Method Using Irradiation Apparatus Having a Partition Member