Patent Assignment
Reel/Frame 053295/0041
Assignment of Assignor's Interest
Recorded: 2020-07-23
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Drying Method