Patent Assignment
Reel/Frame 053330/0616
Assignment of Assignor's Interest
Recorded: 2020-07-28
Pages: 5
Assignee
KLA CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Multi-Layered Moiré Targets and Methods for Using the Same in Measuring Misregistration of Semiconductor Devices