Patent Assignment
Reel/Frame 053365/0669
Assignment of Assignor's Interest
Recorded: 2020-07-30
Pages: 37
Assignors
WASEDA, TAKAYUKI
Executed: 2020-07-20
NAKAGAWA, TAKASHI
Executed: 2020-07-27
NAKATANI, KIMIHIKO
Executed: 2020-07-29
DEGAI, MOTOMU
Executed: 2020-07-10
HASHIMOTO, YOSHITOMO
Executed: 2020-07-10
Assignee
KOKUSAI ELECTRIC CORPORATION
3-4, KANDAKAJI-CHO, CHIYODA-KU, TOKYO, 101-0045, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium