Patent Assignment
Reel/Frame 053382/0020
Assignment of Assignor's Interest
Recorded: 2020-08-03
Pages: 3
Assignors
YOKOYAMA, TAKAHIRO
Executed: 2020-07-17
TOMURA, MAJU
Executed: 2020-07-17
KIHARA, YOSHIHIDE
Executed: 2020-07-27
SUDA, RYUTARO
Executed: 2020-07-17
ORUI, TAKATOSHI
Executed: 2020-07-17
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Etching Method