Patent Assignment
Reel/Frame 053382/0214
Assignment of Assignor's Interest
Recorded: 2020-08-03
Pages: 10
Assignors
HIROSHIRO, KOUKICHI
Executed: 2020-07-16
SAKAZAKI, TETSUYA
Executed: 2020-07-16
KAGAWA, KOJI
Executed: 2020-07-16
SEKIGUCHI, KENJI
Executed: 2020-07-30
MIZUMOTO, KAZUYOSHI
Executed: 2020-07-14
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Method, Substrate Processing Device and Etching Liquid