Patent Assignment
Reel/Frame 053411/0778
Assignment of Assignor's Interest
Recorded: 2020-08-05
Pages: 7
Assignee
KOKUSAI ELECTRIC CORPORATION
3-4, KANDAKAJI-CHO, CHIYODA-KU, TOKYO, 101-0045, JAPAN
Covered Property
(1)
Substrate Processing Apparatus Capable of Adjusting Inner Pressure of Process Chamber Thereof and Method Therefor