Patent Assignment
Reel/Frame 053432/0427
Assignment of Assignor's Interest
Recorded: 2020-08-07
Pages: 4
Assignors
KOIZUMI, KATSUYUKI
Executed: 2020-08-04
TAKAHASHI, MASANORI
Executed: 2020-08-06
EZAKI, SHOTA
Executed: 2020-08-06
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Placing Table Including Heat Exchange Medium Path and Substrate Processing Apparatus Thereof