Patent Assignment
Reel/Frame 053495/0762
Assignment of Assignor's Interest
Recorded: 2020-08-14
Pages: 6
Assignors
MONDEN, TAICHI
Executed: 2020-08-03
ZENKO, TETSU
Executed: 2020-08-04
OTA, KAZUKI
Executed: 2020-08-05
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Film Forming Method and Film Forming Apparatus