Patent Assignment
Reel/Frame 053516/0027
Assignment of Assignor's Interest
Recorded: 2020-08-17
Pages: 6
Assignors
MAEDA, HITOSHI
Executed: 2020-08-11
OHKUBO, RYO
Executed: 2020-08-11
HORIGOME, YASUTAKA
Executed: 2020-08-11
Assignee
HOYA CORPORATION
6-10-1 NISHI-SHINJUKU, SHINJUKU-KU, TOKYO, 160-8347, JAPAN
Covered Property
(1)
Mask Blank, Phase Shift Mask, and Method for Manufacturing Semiconductor Device