Patent Assignment
Reel/Frame 053550/0887
Assignment of Assignor's Interest
Recorded: 2020-08-20
Pages: 3
Assignors
ZHANG, QI
Executed: 2020-08-19
YANG, HAICHUN
Executed: 2020-08-19
CHUNG, HUA
Executed: 2020-08-19
YANG, MICHAEL X.
Executed: 2020-08-19
Assignee
MATTSON TECHNOLOGY, INC.
47131 BAYSIDE PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Processing of Workpieces Using Ozone Gas and Hydrogen Radicals
Application:
63/028,786 →
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.