Patent Application
Provisional
App. No. 63/028,786
· Confirmation No. 8648
PROCESSING OF WORKPIECES USING OZONE GAS AND HYDROGEN RADICALS
Provisional Application Expired
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⬇ PDF
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2021-06-25 | EBCC.AD |
Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update | 1 | View | |
| 2020-06-04 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2020-05-22 | PA.. |
Power of Attorney | 3 | View | |
| 2020-05-22 | ADS |
Application Data Sheet | 9 | View | |
| 2020-05-22 | SPEC |
Specification | 19 | View | |
| 2020-05-22 | CLM |
Claims | 3 | View | |
| 2020-05-22 | ABST |
Abstract | 1 | View | |
| 2020-05-22 | DRW |
Drawings-only black and white line drawings | 8 | View | |
| 2020-05-22 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2020-05-22 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2020-05-22 | 136A |
Authorization for Extension of Time all replies | 1 | View | |
| 2020-05-22 | TRAN.LET |
Transmittal Letter | 1 | View |
Inventors
Qi Zhang
San Jose, CA
Haichun Yang
San Jose, CA
Hua Chung
Saratoga, CA
Michael X. Yang
Palo Alto, CA
Attorneys & Agents of Record
Prosecution
- Customer No.
- 177432
- Docket No.
- AGX-370-P
- Confirmation No.
- 8648
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2021-02-23
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2020-08-20
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Quick Facts
- App. No.
- 63/028,786
- Filed
- 2020-05-22
External Links