Patent Assignment
Reel/Frame 053563/0686
Assignment of Assignor's Interest
Recorded: 2020-08-21
Pages: 3
Assignor
KON, MASATO
Executed: 2020-08-18
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Edge Ring, Plasma Processing Apparatus, and Manufacturing Method of Edge Ring