Patent Assignment
Reel/Frame 053597/0061
Assignment of Assignor's Interest
Recorded: 2020-08-26
Pages: 7
Assignors
SHERMAN, STEVEN R.
Executed: 2014-04-07
RUFFELL, SIMON
Executed: 2014-04-07
HAUTALA, JOHN
Executed: 2014-04-07
BRAND, ADAM
Executed: 2014-04-02
Assignee
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
35 DORY ROAD, GLOUCESTER, MASSACHUSETTS, 01930
Covered Property
(1)
Techniques for Processing Substrates Using Directional Reactive Ion Etching