Patent Assignment
Reel/Frame 053601/0286
Assignment of Assignor's Interest
Recorded: 2020-08-26
Pages: 3
Assignor
HIMEJI, TOSHIAKI
Executed: 2020-07-17
Assignee
CANON TOKKI CORPORATION
10-1, SHINKO-CHO, NIIGATA, MITSUKE-SHI, 954-0076, JAPAN
Covered Property
(1)
Alignment Apparatus, Deposition Apparatus, Electronic Device Manufacturing Apparatus, and Alignment Method