Granted Patent B2

US 12,354,894 · App. 16/711,658 · Granted Jul 8, 2025

Inventor: Toshiaki Himeji (Kashiwa, JP)

Assignee: CANON TOKKI CORPORATION

H01L21/67265C23C14/042C23C16/042H01L21/67709H01L21/6773H01L21/6831

Abstract

Claims (42)

1. An alignment apparatus comprising:

a transport carrier including a guide groove and being configured to hold a substrate and carry the substrate while being transported through a plurality of chambers respectively including a plurality of transport modules, each of the plurality of transport modules including a plurality of roller bearings configured to be inserted into the guide groove of the transport carrier;

a plurality of coils disposed in one of the transport carrier and the plurality of transport modules to control a magnetic force generated between the plurality of coils and a plurality of magnets disposed in the other one of the transport carrier and the plurality of transport modules;

an alignment chamber, included among the plurality of chambers, in which a mask and the substrate held by the transport carrier are aligned in a case where the transport carrier is transported into the alignment chamber by the magnetic force generated between the plurality of coils and the plurality of magnets;

a controller configured to control the magnetic force generated between the plurality of coils and the plurality of magnets by causing a current or a voltage to be applied to the plurality of coils to transport the transport carrier through the plurality of chambers;

a first position detector configured to detect a position of the transport carrier being transported through the plurality of chambers, the first position detector including an encoder or a distance sensor; and

a second position detector configured to detect a position of the transport carrier in the alignment chamber, the second position detector including a camera,

wherein

the controller is configured to control, based on first position information obtained by the first position detector, the magnetic force so that the transport carrier is transported through the plurality of chambers including a first chamber different from the alignment chamber,

the controller is configured to control the magnetic force so that the transport carrier is transported through the first chamber in a roller transport mode in which the transport carrier holds the substrate and in which the guide groove of the transport carrier contacts a first plurality of roller bearings of a first transport module included in the first chamber, and

the controller is configured to, after the transport carrier is transported through the first chamber in the roller transport mode in which the guide groove of the transport carrier contacts the first plurality of roller bearings of the first transport module included in the first chamber, control, based on second position information obtained by the second position detector, the magnetic force to adjust a position of the transport carrier to perform positioning of the substrate and the mask in the alignment chamber, in a magnetic levitation transport mode in which the transport carrier holds the substrate and is levitated by the magnetic force in the alignment chamber such that the guide groove of the transport carrier does not contact a second plurality of roller bearings of a second transport module included in the alignment chamber, in a first axis direction and in a second axis direction crossing the first axis direction, and to rotate the transport carrier in the magnetic levitation transport mode around a third axis extending in a direction crossing both the first axis direction and the second axis direction, and wherein

the guide groove of the transport carrier includes an upper guide surface and a lower guide surface that face each other and are arranged parallel to each other, and

in the magnetic levitation transport mode in which the transport carrier holds the substrate and is levitated by the magnetic force in the alignment chamber, the second plurality of roller bearings of the second transport module included in the alignment chamber are inserted in the guide groove of the transport carrier while being spaced apart from the upper guide surface and the lower guide surface of the guide groove.

2. The alignment apparatus according to claim 1 , wherein

the transport carrier includes the plurality of magnets arranged in a transport direction of the transport carrier, and the plurality of transport modules include the plurality of coils disposed to face the plurality of magnets.

3. The alignment apparatus according to claim 2 , wherein

the plurality of magnets are arranged to form a plurality of magnet arrays which are paired on left and right sides with respect to the transport direction.

4. The alignment apparatus according to claim 3 , wherein

at least one of the plurality of magnet arrays formed to be paired on the left and right sides with respect to the transport direction further includes a plurality of magnet arrays.

5. The alignment apparatus according to claim 1 , wherein

the first axis direction corresponds to a transport direction of the transport carrier along which the transport carrier is transported, and

the second axis direction corresponds to a direction perpendicular to the transport direction.

6. The alignment apparatus according to claim 1 , wherein

the camera included in the second position detector includes an alignment camera configured to simultaneously image alignment marks respectively disposed on the substrate and the mask, and

the controller is configured to control the magnetic force to adjust the position of the transport carrier and to rotate the transport carrier on the basis of images of the alignment marks captured by the alignment camera.

7. The alignment apparatus according to claim 1 , wherein

the transport carrier includes electrostatic chucking which chucks and holds the substrate.

8. The alignment apparatus according to claim 7 , wherein

the transport carrier includes magnetic chucking which chucks the mask through the substrate held by the electrostatic chucking.

9. A deposition apparatus comprising:

the alignment apparatus according to claim 1 ; and

a deposition chamber in which deposition materials are deposited on the substrate having been transported from the alignment chamber.

10. The deposition apparatus according to claim 9 , wherein

both positioning of the transport carrier and the mask in the alignment chamber and transport of the transport carrier are caused by the magnetic force.

11. An electronic device manufacturing apparatus which manufactures an electronic device by forming films on the substrate using the deposition apparatus according to claim 9 .

12. An alignment method for a substrate and a mask, comprising:

transporting a transport carrier, which includes a guide groove and holds a substrate, through a plurality of chambers including an alignment chamber and a first chamber different from the alignment chamber by controlling a magnetic force applied to the transport carrier based on first position information obtained by a first position detector including an encoder or a distance sensor, the plurality of chambers respectively including a plurality of transport modules, each of the plurality of transport modules including a plurality of roller bearings configured to be inserted into the guide groove of the transport carrier;

controlling the magnetic force so that the transport carrier is transported through the first chamber in a roller transport mode in which the transport carrier holds the substrate and in which the guide groove of the transport carrier contacts a first plurality of roller bearings of a first transport module included in the first chamber;

adjusting a position of the transport carrier, after the transport carrier is transported through the first chamber in the roller transport mode in which the guide groove of the transport carrier contacts the first plurality of roller bearings of the first transport module included in the first chamber, in a magnetic levitation transport mode, in which the transport carrier holds the substrate and is levitated by the magnetic force in the alignment chamber such that the guide groove of the transport carrier does not contact a second plurality of roller bearings of a second transport module included in the alignment chamber, in a first axis direction and in a second axis direction crossing the first axis direction by controlling the magnetic force applied to the transport carrier based on second position information obtained by a second position detector including a camera, to perform positioning of the substrate and the mask in the alignment chamber; and

rotating the transport carrier in the magnetic levitation transport mode around a third axis extending in a direction crossing both the first axis direction and the second axis direction by controlling the magnetic force applied to the transport carrier based on the second position information, wherein

the guide groove of the transport carrier includes an upper guide surface and a lower guide surface that face each other and are arranged parallel to each other, and

in the magnetic levitation transport mode in which the transport carrier holds the substrate and is levitated by the magnetic force in the alignment chamber, the second plurality of roller bearings of the second transport module included in the alignment chamber are inserted in the guide groove of the transport carrier while being spaced apart from the upper guide surface and the lower guide surface of the guide groove.

Assignments (1)

Priority Claims (1)

Continuity (1)

References Cited (17)