Patent Assignment
Reel/Frame 053641/0887
Assignment of Assignor's Interest
Recorded: 2020-08-31
Pages: 10
Assignors
HAGIHARA, JUNICHI
Executed: 2019-10-24
KOMATSU, SHIGEKAZU
Executed: 2019-10-25
FURUYA, KUNIHIRO
Executed: 2019-10-25
HOSAKA, TADAYOSHI
Executed: 2019-10-24
MURAMATSU, NAOKI
Executed: 2019-10-24
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Wafer Inspection System, Wafer Inspection Apparatus and Prober