Patent Assignment
Reel/Frame 053692/0685
Assignment of Assignor's Interest
Recorded: 2020-09-04
Pages: 4
Assignor
TANOUE, HAYATO
Executed: 2020-08-28
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing System for Removing Peripheral Portion of Substrate, Substrate Processing Method and Computer Readable Recording Medium Thereof