Patent Assignment
Reel/Frame 053717/0491
Assignment of Assignor's Interest
Recorded: 2020-09-09
Pages: 4
Assignors
OTA, TAKASHI
Executed: 2020-08-28
HAYASHI, MASAYUKI
Executed: 2020-08-28
OKUDA, JIRO
Executed: 2020-08-28
NAKASHIMA, AKIHIRO
Executed: 2020-08-28
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method