Patent Assignment
Reel/Frame 053735/0901
Assignment of Assignor's Interest
Recorded: 2020-09-10
Pages: 4
Assignors
KOSHIMIZU, CHISHIO
Executed: 2020-09-04
HIRANO, TAICHI
Executed: 2020-09-07
HAYASAKA, TORU
Executed: 2020-09-07
KUBOTA, SHINJI
Executed: 2020-09-04
MARUYAMA, KOJI
Executed: 2020-09-04
DOKAN, TAKASHI
Executed: 2020-09-07
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Control Method and Plasma Processing Apparatus