Patent Assignment
Reel/Frame 053740/0990
Assignment of Assignor's Interest
Recorded: 2020-09-11
Pages: 6
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Gas Cluster Assisted Plasma Processing