Patent Assignment
Reel/Frame 053769/0350
Assignment of Assignor's Interest
Recorded: 2020-09-15
Pages: 3
Assignors
JUN, SUNGHOON
Executed: 2020-06-02
JUNG, HEECHUL
Executed: 2020-06-02
JEON, YONJONG
Executed: 2020-06-02
Assignee
ASM IP HOLDING B.V.
VERSTERKERSTRAAT 8, ALMERE, 1322 AP, NETHERLANDS
Covered Property
(1)
Temperature Control Assembly for Substrate Processing Apparatus and Method of Using Same