Temperature control assembly for substrate processing apparatus and method of using same
Exemplary embodiments of the disclosure provide improved reactor systems, assemblies, and methods for controlling a temperature within the reactor system, such as a temperature of a gas supply unit. Exemplary systems and methods employ an exhaust unit to cause movement of a fluid over a portion of the gas supply unit to better control the temperature of the gas supply unit.
1. An assembly comprising:
a gas supply unit;
a gas curtain mounted on the gas supply unit;
an insulator overlying the gas supply unit;
a shield cover overlying the insulator; and
an exhaust unit fluidly coupled to a region between the gas curtain and the shield cover,
wherein the insulator is formed of a non-conducting material and comprises a plurality of through holes in a lateral direction.
2. The assembly of claim 1 , further comprising a gas inlet that extends through a part of a stacked structure comprising the gas curtain and the shield cover.
3. The assembly of claim 2 , wherein the gas inlet comprises a first portion and a second portion, wherein the second portion comprises non-conductive material, and wherein the second portion is received by the gas curtain.
4. The assembly of claim 1 , wherein the gas curtain comprises a recessed portion and a plurality of pins arranged on the recessed portion.
5. The assembly of claim 4 , wherein at least one of the plurality of pins is column shaped or cylinder shaped.
6. The assembly of claim 4 , wherein at least one of the plurality of pins comprises a hollow space.
7. The assembly of claim 4 , wherein a height of each of the plurality of pins does not extend beyond a top surface of the gas supply unit.
8. The assembly of claim 4 , wherein a spacing between the plurality of pins is substantially constant in a direction from a center of the recessed portion to a periphery of the recessed portion.
9. The assembly of claim 4 , wherein a surface of the gas curtain near the exhaust unit does not comprise pins.
10. The assembly of claim 1 , wherein the shield cover comprises a plurality of holes in a vertical direction, a plurality of holes in a lateral direction, or both.
11. The assembly of claim 1 , wherein the exhaust unit exhausts a fluid from a recessed portion of the gas curtain.
12. The assembly of claim 11 , wherein the exhaust unit comprises a variable-speed fan.
13. The assembly of claim 1 , wherein the gas supply unit and the gas curtain form an integral structure.
14. The assembly of claim 1 , further comprising a thermal insulator overlying at least a portion of the shield cover.
15. An assembly comprising:
a gas supply unit;
a gas curtain mounted on the gas supply unit, the gas curtain comprising a recessed portion comprising a plurality of pins thereon;
an insulator, formed of a non-conducting material and comprising a plurality of holes therethrough in a lateral direction, overlying the gas supply unit; and
a shield cover, comprising a plurality of holes therethrough, overlying the insulator.
16. The assembly of claim 15 , further comprising an exhaust unit fluidly coupled to the recessed portion.
17. The assembly of claim 16 , wherein the exhaust unit comprises a fan.
18. The assembly of claim 1 , wherein a cross-sectional dimension of at least one of plurality of through holes is about 1 mm to 12 mm.
19. The assembly of claim 10 , wherein a cross-sectional dimension of at least one of plurality of holes is less than 5 mm in size.