Developing device and developing method
The developing device comprises: a development chamber that is provided with an air extraction pipeline for extracting air inside the development chamber to outside the development chamber; a carrier that is disposed in the development chamber for supporting a wafer; a plurality of temperature sensors that are disposed on the carrier for detecting temperatures of a plurality of target regions; a plurality of mutually independent air supply pipelines for supplying air to the development chamber, each of the target regions corresponding to at least one air supply pipeline; and a control unit for acquiring measured temperatures of the temperature sensors and calculating current temperatures of the corresponding target regions, and basing on the current temperatures of the target regions to adjust air parameters of the corresponding air supply pipelines, so that the temperatures of the corresponding target regions rest within a preset temperature range.
1. A developing device, characterized in comprising:
a development chamber, provided with an air extraction pipeline for extracting air inside the development chamber to outside the development chamber;
a carrier, disposed in the development chamber, for supporting a wafer;
a plurality of temperature sensors, disposed on the carrier, for detecting temperatures of a plurality of target regions;
a plurality of mutually independent air supply pipelines, for supplying air to the development chamber, each air supply pipeline having a nozzle towards the carrier, each of the target regions corresponding to at least one air supply pipeline; and
a control unit, for acquiring measured temperatures of the temperature sensors and basing on the measured temperatures to calculate current temperatures of the corresponding target regions, and basing on the current temperatures of the target regions to adjust air parameters of the corresponding air supply pipelines, so that the temperatures of the corresponding target regions rest within a preset temperature range;
wherein the carrier has a plurality of target regions in the shape of concentric rings, each target region in the shape of concentric ring is provided therein with a plurality of uniformly distributed temperature sensors, and the control unit is employed to acquire measured temperatures of the temperature sensors in the target region and calculate an average temperature of all temperature sensors in the target region to serve as the current temperature of the corresponding target region;
the developing device further comprising:
a turntable, disposed between the carrier and all nozzles, the turntable having a plurality of air-blowing regions in the shape of concentric rings, the air-blowing regions corresponding to the target regions on a one-by-one basis to blow air to corresponding target regions, each air-blowing region in the shape of concentric ring being opened with a plurality of uniformly distributed through-holes, above each air-blowing region in the shape of concentric ring being provided a plurality of uniformly distributed nozzles, the turntable being rotatable within a plane parallel to the carrier, and the through-holes allowing airflows of the nozzles to pass during rotation process.
2. The developing device according to claim 1 , wherein
the nozzles are within the same and single plane parallel to an upper surface of the carrier, and the turntable is located below and abuts against the nozzles.
3. The developing device according to claim 1 , wherein
the air-blowing regions in the shape of concentric rings are opened with the same number of through-holes.
4. The developing device according to claim 3 , wherein each air-blowing region in the shape of concentric ring is opened with four uniformly distributed through-holes, and each through-hole corresponds to one nozzle.
5. The developing device according to claim 3 , wherein length of a single through-hole increases with increase of ring diameter of the corresponding air-blowing region in the shape of concentric ring.
6. The developing device according to claim 1 , wherein
widths of the through-holes opened in the air-blowing regions are equal to widths of the corresponding air-blowing regions.
7. The developing device according to claim 6 , wherein the adjacent air-blowing regions are arranged with an interval there between, and the intervals amongst all the adjacent air-blowing regions are identical.
8. The developing device according to claim 4 , wherein intervals amongst the adjacent air-blowing regions are equal to widths of the through-holes.
9. The developing device according to claim 1 wherein a temperature regulator is installed in the air supply pipeline, and the control unit changes air temperature in the corresponding air supply pipeline by controlling the temperature regulator.