Patent Assignment
Reel/Frame 053901/0380
Assignment of Assignor's Interest
Recorded: 2020-09-28
Pages: 4
Assignors
SHAW, DENIS
Executed: 2020-09-21
FAIRBAIRN, KEVIN
Executed: 2020-09-10
CARTER, DANIEL
Executed: 2020-09-10
Assignee
ADVANCED ENERGY INDUSTRIES, INC.
1625 SHARP POINT DRIVE, FORT COLLINS, COLORADO, 80525
Covered Property
(1)
Spatial Monitoring and Control of Plasma Processing Environments