Patent Assignment
Reel/Frame 053901/0597
Assignment of Assignor's Interest
Recorded: 2020-09-28
Pages: 3
Assignor
VUKOVIC, MIRKO
Executed: 2020-09-23
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Apparatus and Methods for Beam Processing of Substrates