Patent Assignment
Reel/Frame 053930/0305
Assignment of Assignor's Interest
Recorded: 2020-09-30
Pages: 8
Assignors
TAKAGI, SATOSHI
Executed: 2020-09-08
KITAMURA, KAZUYA
Executed: 2020-09-11
TSAI, HSIULIN
Executed: 2020-09-23
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Film Forming Method and Film Forming Apparatus